Icp antenna and plasma generating apparatus using the same
作者： Jin-hyuk Choi , Hyung-Chul Cho , Sang-Chul Han , Sang-Jean Jeon , Myoung-woon Kim
DOI:
关键词: Monopole antenna 、 Antenna (radio) 、 Optics 、 Materials science 、 Patch antenna 、 Inductance 、 Plasma 、 Plasma density
摘要: An inductively-coupled antenna (ICP) in a plasma generating apparatus comprises an inner segment having annular shape and at least one outer approximately concentrically placed outside of the segment, connected to series, wherein segments have plurality coils parallel with each other different diameter from other. Accordingly, present invention provides ICP using same simple structure, reduced inductance, improved uniformity density.
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