Cantilever diffusion tube apparatus and method
作者： Andrew F. Wollmann
DOI:
关键词: Materials science 、 Diffusion tube 、 Composite material 、 Wafer 、 Cantilever 、 Tube (fluid conveyance) 、 Window opening 、 Thermal shock 、 Diffusion (business) 、 Semiconductor 、 Structural engineering
摘要: A cantilever diffusion tube apparatus includes a quartz having support end clamped to laterally movable carriage mechanism and an outer portion containing plurality of spaced semiconductor wafers. The is coaxially aligned with furnace. the sealed by door plate through which gas extends. wafers are loaded into window opening. then moves therein tube. Reactant gases caused flow tube, between heated therein, out Then purging therein. Withdrawal from performed as continues, avoiding excessive thermal shock, premature exposure ambient oxygen air defect-causing particles. when contaminated after number runs, easily exchanged for clean one, need frequent cleaning
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