Electron-stimulated desorption and adsorption sites of chlorine on GaAs(110) surfaces

作者: D. Troost , H.J. Clemens , L. Koenders , W. Mönch

DOI: 10.1016/0167-2584(93)90620-X

关键词: Auger electron spectroscopyChlorineElectronAnalytical chemistryKelvin probe force microscopeChemistryPhotochemistryMonolayerSpectroscopyAdsorptionDesorption

摘要: Abstract The adsorption of chlorine on GaAs(110) surfaces was followed by using a Kelvin probe as well ultraviolet photoemission, Auger electron, and low-energy electron energy-loss spectroscopy. bombardment chlorinated with electrons promotes the desorption adsorbate. Electron-stimulated from reveals two different sites, which are equally occupied after before electron-stimulated desorption. assignment sites to Ga-Cl As-Cl bonds is supported further experimental observations. Below one monolayer, atom will be bound each Ga As surface atoms while for larger uptake 2 complexes might possibly form.

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