Unusual electron beam effects in the GaAs (100)/Cl2 system
作者： S.M Mokler , P.R Watson
DOI: 10.1016/0038-1098(89)91070-3
关键词: Desorption 、 Auger 、 Semiconductor materials 、 Analytical chemistry 、 Adsorption 、 Signal 、 Chlorine 、 Cathode ray 、 Chemistry
摘要: Abstract We find that chlorine adsorbed on a (1x1) GaAs (100) surface is very sensitive to electron-induced desorption. Loss of appears occur via at least one fast, and slow, route with different cross-sections. Changes in the Ga Auger signal indicate significant Ga-Cl interactions during adsorption
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N. D. Spencer, P. J. Goddard, P. W. Davies, M. Kitson, R. M. Lambert, A simple, controllable source for dosing molecular halogens in UHV Journal of Vacuum Science and Technology. ,vol. 1, pp. 1554- 1555 ,(1983) , 10.1116/1.572185
R.D. Schnell, D. Rieger, A. Bogen, K. Wandelt, W. Steinmann, Surface core-level shifts for chlorine covered GaAs (1 1 0) surfaces Solid State Communications. ,vol. 53, pp. 205- 208 ,(1985) , 10.1016/0038-1098(85)90127-9
D. Troost, Pinning of the Fermi level close to the valence-band top by chlorine adsorbed on cleaved GaAs(110) surfaces Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 5, pp. 1119- 1124 ,(1987) , 10.1116/1.583739
M. S. Ameen, T. M. Mayer, Surface segregation during reactive etching of GaAs and InP Journal of Applied Physics. ,vol. 59, pp. 967- 969 ,(1986) , 10.1063/1.336574
R. A. Barker, T. M. Mayer, Randolph H. Burton, Surface composition and etching of III‐V semiconductors in Cl2ion beams Applied Physics Letters. ,vol. 40, pp. 583- 586 ,(1982) , 10.1063/1.93188
P Oelhafen, JL Freeouf, GD Pettit, JM Woodall, Elevated temperature low energy ion cleaning of GaAs Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 1, pp. 787- 790 ,(1983) , 10.1116/1.582693
G. Margaritondo, J. E. Rowe, C. M. Bertoni, C. Calandra, F. Manghi, Chemisorption geometry on cleaved III-V surfaces: Cl on GaAs, GaSb, and InSb Physical Review B. ,vol. 20, pp. 1538- 1545 ,(1979) , 10.1103/PHYSREVB.20.1538
Desorption Induced by Electronic Transitions DIET II Springer Berlin Heidelberg. ,(1985) , 10.1007/978-3-642-82547-7