Low temperature gettering of Cu, Ag, and Au across a wafer of Si by Al
作者： R. D. Thompson , K. N. Tu
DOI: 10.1063/1.93565
关键词: Silicon 、 Aluminium 、 Annealing (metallurgy) 、 Metallurgy 、 Copper 、 Analytical chemistry 、 Materials science 、 Getter 、 Wafer 、 Noble metal 、 Spectroscopy 、 Physics and Astronomy (miscellaneous)
摘要: … they have diffused across the Si wafer at this low temperature and are gettered by the Al to a … for Cu, Ag, and Au after the annealing, respectively. These spectra indicate that only …
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