Review of Graphene as a Solid State Diffusion Barrier.

作者: Wayne K. Morrow , Stephen J. Pearton , Fan Ren

DOI: 10.1002/SMLL.201501120

关键词: Diffusion barrierCarbideGraphene oxide paperAtomic diffusionGrapheneNanotechnologyElectrical contactsMaterials scienceMicroelectronicsMetal

摘要: … as a cladding layer to prevent Cu mass transport into silicon, … , a 15-layer, 5 nm MLG stack was utilized to test its effects on … Ta/Si/Ti/Al/Ni/Ta, all of which can achieve contact resistances …

参考文章(159)
S. Das Sarma, E. H. Hwang, Dielectric function, screening, and plasmons in 2D graphene arXiv: Strongly Correlated Electrons. ,(2006) , 10.1103/PHYSREVB.75.205418
H Omiya, S Srinivasan, FA Ponce, S Tanaka, H Marui, T Mukai, Crystal Structure of Low-Resistance Au-Ni/p-GaN Contacts AIP Conference Proceedings. ,vol. 772, pp. 421- 422 ,(2005) , 10.1063/1.1994165
Alpha T. N’Diaye, Sebastian Bleikamp, Peter J. Feibelman, Thomas Michely, Two-dimensional Ir cluster lattice on a graphene Moiré on Ir(111) Physical Review Letters. ,vol. 97, pp. 215501- ,(2006) , 10.1103/PHYSREVLETT.97.215501
Aniruddha Konar, Tian Fang, Debdeep Jena, Effect of high- κ gate dielectrics on charge transport in graphene-based field effect transistors Physical Review B. ,vol. 82, pp. 115452- ,(2010) , 10.1103/PHYSREVB.82.115452
J Hass, W A de Heer, E H Conrad, The growth and morphology of epitaxial multilayer graphene Journal of Physics: Condensed Matter. ,vol. 20, pp. 323202- ,(2008) , 10.1088/0953-8984/20/32/323202
Z. Klusek, W. Kozlowski, Z. Waqar, S. Datta, J.S. Burnell-Gray, I.V. Makarenko, N.R. Gall, E.V. Rutkov, A.Ya. Tontegode, A.N. Titkov, Local electronic edge states of graphene layer deposited on Ir(1 1 1) surface studied by STM/CITS Applied Surface Science. ,vol. 252, pp. 1221- 1227 ,(2005) , 10.1016/J.APSUSC.2005.02.083
H. Omiya, F. A. Ponce, H. Marui, S. Tanaka, T. Mukai, Atomic arrangement at the Au∕p-GaN interface in low-resistance contacts Applied Physics Letters. ,vol. 85, pp. 6143- 6145 ,(2004) , 10.1063/1.1840105
Q. J. Wang, J. G. Che, Origins of Distinctly Different Behaviors of Pd and Pt Contacts on Graphene Physical Review Letters. ,vol. 103, pp. 066802- ,(2009) , 10.1103/PHYSREVLETT.103.066802
Zheng Yan, Jian Lin, Zhiwei Peng, Zhengzong Sun, Yu Zhu, Lei Li, Changsheng Xiang, E Loic Samuel, Carter Kittrell, James M Tour, None, Toward the synthesis of wafer-scale single-crystal graphene on copper foils. ACS Nano. ,vol. 6, pp. 9110- 9117 ,(2012) , 10.1021/NN303352K