Method for producing substrate having surface nanostructure
作者： Shigenori Fujikawa , Harumi Hayakawa , Ken Miyagi , Takahiro Senzaki
DOI:
关键词: Alkyl 、 Organic chemistry 、 Phase (matter) 、 Chemical engineering 、 Substrate (chemistry) 、 Alkoxy group 、 Vapor pressure 、 Layer (electronics) 、 Nanostructure 、 Materials science 、 Copolymer
摘要: Provided is a method for producing substrate having surface nanostructure comprising phase separation step heating and thereby promoting of layer containing block copolymer multiple blocks bonded together that has been formed on substrate, decomposition decomposing at least portion the from one form this layer, selective removal selectively removing decomposed in by immersing developing solution, wherein primary component solution an organic solvent SP value between 7.5 11.5 (cal/cm3)1/2 vapor pressure 25oC less than 2.1 kPa, or benzene optionally substituted alkyl groups, alkoxy halogen atoms.
lens.org 参考文章(10)
Bernard L. Laurin, Abrasion and antifog-resistant optical element ,(1976)
William Hinsberg, Joy Cheng, Ho-Cheol Kim, Daniel P. Sanders, Self-assembling materials for lithographic patterning: overview, status, and moving forward Proceedings of SPIE. ,vol. 7637, ,(2010) , 10.1117/12.852230
Toshiro Hiraoka, Koji Asakawa, Yasuyuki Hotta, Yoshihiro Akasaka, Method for manufacturing porous structure and method for forming pattern ,(2011)
Hiroaki Wakayama, Yoshiaki Fukushima, Method for producing a nanostructured material ,(2008)
Wakana Kubo, Sanae Furuya, Shigenori Fujikawa, Hideo Hada, Toyoki Kunitake, Anisotropic film and method of manufacturing anisotropic film ,(2008)
Koji Yamaguchi, Toru Yamaguchi, 浩司 山口, 徹 山口, Pattern formation method and mold ,(2006)
鋼児 浅川, Toshiro Hiraoka, Yasuyuki Hotta, 俊郎 平岡, Yoshihiro Akasaka, 康之 堀田, 芳浩 赤坂, Kouji Asakawa, Pattern-forming material, pattern-forming method, method for producing porous structure, electrochemical cell, method for producing porous carbon structure, and the porous carbon structure ,(2004)
Katy Bosworth Joan, Elizabeth Dobisz, ルイズ リカルド, ローズ フランク, ケイティ ボスワーズ ジョアン, ドブィスズ エリザベス, Franck Rose, Ricardo Ruiz, Supporting membrane on self-organizing film of nanometer scale ,(2010)
若奈 久保, Wakana Kubo, Sanae Furuya, Shigenori Fujikawa, Hideo Haneda, Harumi Hayakawa, 茂紀 藤川, 晴美 早川, Toyoki Kunitake, 豊喜 国武, 英夫 羽田, 早苗 古谷, Manufacturing method for film containing nano-structure, and film containing nano-structure ,(2008)
Hotta Yasuyuki, Hiraoka Toshiro, Asakawa Kouji, Akasaka Yoshihiro, METHOD FOR MANUFACTURING POROUS STRUCTURE ,(2007)