Metal/silicon contact and methods of fabrication thereof
作者： Iwao Ohdomari , Tung-Sheng Kuan , Paul S. Ho , Arnold Reisman , Uwe Koster
DOI:
关键词: Metallurgy 、 Silicon 、 Group (periodic table) 、 Fabrication 、 Aluminium 、 Noble metal 、 Materials science 、 Metal
摘要: Methods and resulting structures for thermally stable metal/silicon contacts are described. The aluminum which is alloyed with at least one noble metal from the group of Pd Pt wherein region contact further silicon.
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