Soft probe for providing high speed on-wafer connections to a circuit

摘要: Miniature soft probes are used to provide a high speed connection circuits on wafer. The probe contains co-planar line substrate which provides flexibility for secure contacts. A miniature coaxial is directly connected the coplanar with zero degree angle. This configuration makes very small and result in performance. planar link between two ground planes eliminates any unwanted odd mode. have wideband transmission lines interfaces picoseconds bandwidths hundreds of gigahertz. multi-functional capabilities, such as impedance buffering DC blocking, due printed constitute portion probe. produced by thin film photolithic process. These best suited on-wafer tests, diagnostics measurements well interfacing other electronic or electro-optical systems.