Method and apparatus for amplifying electrical test signals from a micromechanical device
作者： James L. Heiertz , Hugh Joseph Murphy , Elizabeth Ruth Bryan , Murden K. Deadwyler , David N. Green
DOI:
关键词: Amplifier 、 Engineering 、 Spectrum analyzer 、 Noise (signal processing) 、 Microelectromechanical systems 、 Transmission (telecommunications) 、 Small amplitude 、 Electrical engineering 、 Test probe 、 Signal-to-noise ratio
摘要: An apparatus and method is provided for testing performance characteristics of a MEMs device. The includes test probe that electrically connected to mechanical member the device receiving electrical data signals from are indicative movement due external excitation. also communications means transmitting probed an analyzer analyzing determine amplifier between communication means. placed in close proximity such it amplifies prior transmission by As such, amplified before sufficient noise introduced into reduce their signal ratio less than predetermine level. By amplifying introduction significant noise, signals, which may have relatively small amplitude, not obscured noise.
lens.org 参考文章(11)
Wong Thomas Y, NON-CONTACT VIBRATION VELOCITY APPARATUS ,(1973)
Imants R. Lauks, Henry J. Wieck, Gregory M. Bandru, Fluidics head for testing chemical and ionic sensors ,(1990)
Robert S. Cherry, Active probe card for high resolution/low noise wafer level testing ,(1985)
Tatsuya Ishii, Kazutoshi Miyamoto, Test analysis apparatus and analysis method for semiconductor wafer using OBIC analysis ,(1994)
Armand P. Neukermans, Timothy G. Slater, Monolithic silicon rate-gyro with integrated sensors ,(1995)
Zhi-Yuan Shen, Roy M. Patt, Sadeg M. Faris, Robert E. Drake, Soft probe for providing high speed on-wafer connections to a circuit ,(1988)
Kiyoyasu Hiwada, Toshio Tamamura, Test head with improved shielding ,(1988)
John W. Tarzwell, Probe device for integrated circuit wafers ,(1977)
Daniel B. D'Souza, Active probe card ,(1992)
Lewis T. Rector, Interface connector assembly ,(1991)