Fullerene-like carbon nanoparticles generated by radiofrequency plasma-enhanced chemical vapour deposition

摘要: We report a preliminary microstructural analysis of carbonaceous dust generated by radio-frequency plasma-enhanced chemical vapour deposition using methane as precursor. The extracted has been analysed highresolution transmission electron microscopy and significant population fullerene-like aggregates carbon nanoparticles nanotubes revealed. This is believed to be the first material containing curved graphene layers this technique, we conclude that method could adapted produce bulk quantities for industrial applications.