High performance wide trench IGBTs for motor control applications
作者： A. Bhalla , J. Gladish , A. Polny , P. Sargeant , G. Dolny
DOI: 10.1109/ISPSD.1999.764039
关键词: Electric motor 、 Voltage drop 、 Electrical engineering 、 Motor control 、 Optoelectronics 、 Engineering 、 Trench 、 Etching
摘要: IGBTs with wide trench widths offer the possibility of an improved trade-off between conduction and switching loss due to injection enhancement effect, while preserving devices' short-circuit withstand capability. This makes them promising candidates for motor control applications. 600 V 8-12 /spl mu/m have been successfully fabricated excellent electrical characteristics. The critical shaping process is accomplished by use a long LOCOS-like oxidation after deep has etched. They low on-state voltage drops, turn-off losses, square RBSOA good
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