Repetitive High-Voltage All-solid-state Marx Generator for Excimer DBD UV Sources
作者： Yonggang Wang , Liqing Tong , Qiuyi Han , Kefu Liu
关键词: Marx generator 、 Capacitor 、 Optoelectronics 、 High voltage 、 Voltage 、 Electrical engineering 、 Dielectric barrier discharge 、 Pulse generator 、 Materials science 、 Radiant energy 、 Pulsed power
摘要: In order to develop an efficient and reliable pulsed power supply for excimer dielectric barrier discharge (DBD) ultraviolet (UV) sources, a pulse generator using Marx topology is adopted. MOSFETs are used as switches. The 12-stage operates with voltage amplitude in the range of 0–5.5 kV. repetition rate pulsewidth can be adjusted from 0.1 50 kHz 2 20 $\mu \text{s}$ , respectively. It excite KrCl* excilamp, typical DBD UV source. evaluate performance generator, sinusoidal dedicated lamp also excilamp. shows that excited by has better regard radiant system efficiency. influence amplitude, rate, pulsewidth, rise fall times on efficiency investigated generator. An inductor inserted between excilamp reduce electromagnetic interference enhance reliability. experimental results show it helps improve
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