Microfabricated phononic crystal devices and applications

作者: R H Olsson III , I El-Kady

DOI: 10.1088/0957-0233/20/1/012002

关键词: AcousticsOptoelectronicsMicrofabricationPhotonic crystalNondestructive testingSurface acoustic waveMaterials scienceAcoustic waveMicroelectromechanical systemsSurface micromachiningCrystal

摘要: … micro-phononic crystal fabrication and simplified testing promise not only the deployment of phononic … but also greater experimentation on a wide variety of phononic crystal structures. …

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