Large scale excimer laser production of submicron periodic structures on polymer surfaces

摘要: Abstract By absorption of a polarized excimer laser beam low fluence new class submicron induced structures is produced on various polymer surfaces. Parallel ripples less than 0.2 μm spacing in the direction electric field are obtained with ArF or KrF radiation when it strongly absorbed by polymer. The amplitude roughening increases number pulses used, maximum after one thousand. Several polymers thin thick films commercial laboratory origin can be textured air vacuum both depending chemical structure. Fluence below ablation threshold and must chosen narrow window, which depends wavelength used. relief observed SEM, TEM characterized ellipsometry. Structures also irradiation film (2000 A) coated silicon wafers. In many applications, controlled level surfaces desired. Owing to simplicity this procedure large scale surface treatments possible.