Electron-beam-induced conduction in a ruthenium carbonyl nanoparticle polymer
作者： M. D. R. Thomas , H. Ahmed , K. M. Sanderson , D. S. Shephard , B. F. G. Johnson
DOI: 10.1063/1.126163
关键词: Polymer 、 Nanoparticle 、 Ruthenium 、 Conductive polymer 、 Polymer chemistry 、 Materials science 、 Physical chemistry 、 Electrical resistivity and conductivity 、 Thermal conduction 、 Orders of magnitude (temperature) 、 Conductivity
摘要: A polymer composed of ruthenium carbonyl and the formula [Ru6C(CO)15Ph2PCCPPh2]n has been synthesized. It is found to behave as a negative electron-beam resist with sensitivity 400 C/m2. Upon exposure electron beam, electrical conductivity patterned films vary over seven orders magnitude according power-law dependence on dose. Temperature studied, conduction attributed variable-range hopping between superclusters in two dimensions.
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