Microfabricated gas sensor systems with sensitive nanocrystalline metal-oxide films

摘要: This article gives an overview on recent developments in metal-oxide-based gas sensor systems, particular nanocrystalline oxide materials deposited modern, state-of-the-art platforms fabricated microtechnology. First, sensors are introduced, and the underlying principles fundamentals of sensing process laid out. In second part, different deposition methods, such as evaporation, sputtering, sol–gel techniques, aerosol screen-printing, their applicability to micro-scale substrates discussed terms precision, achievable layer thickness, well with regard possibility use pre-processed materials. third microsensor and, particular, semiconductor- microelectronics-based platforms, which have been in, e.g., standard CMOS-technology (CMOS: complementary metal-oxide semiconductor), briefly reviewed. The microfabricated inevitably imposes constraints, temperature limits, applied nanomaterial processing methods. These limitations work-arounds described. Additionally, monolithic systems presented that combine microtransducers or microhotplates, coated nanomaterials, necessary control driving electronics a single chip. most advanced standalone units can be directly connected computer via digital interface.