Verification of Fowler-Nordheim electron tunneling mechanism in Ni/SiO 2 /n-4H SiC and n + poly-Si/SiO 2 /n-4H SiC MOS devices by different models

作者: Subba Ramaiah Kodigala

DOI: 10.1016/J.PHYSB.2016.07.013

关键词: Rectangular potential barrierField electron emissionSemiconductorVoid (astronomy)Fermi energyNanotechnologyElectric fieldQuantum tunnellingOxideMaterials scienceCondensed matter physics

摘要: Abstract This article emphasizes verification of Fowler–Nordheim electron tunneling mechanism in the Ni/SiO 2 / n -4H SiC MOS devices by developing three different kinds models. The standard semiconductor equations are categorically solved to obtain change Fermi energy level with effect temperature and field that extend support determine sustainable accurate current through oxide layer. forward reverse bias currents variation electric simulated help models developed us for applying adequate conditions. latter is quite from former terms devices. barrier height quantum mechanical, temperature, fields considered as effective generation current–field ( J – F ) curves under biases but mechanical void latter. In addition, also carrier concentration -type 4H relation between them established.

参考文章(41)
M. Lenzlinger, E. H. Snow, Fowler‐Nordheim Tunneling into Thermally Grown SiO2 Journal of Applied Physics. ,vol. 40, pp. 278- 283 ,(1969) , 10.1063/1.1657043
Yogesh K. Sharma, A.C. Ahyi, Tamara Issacs-Smith, M.R. Jennings, S.M. Thomas, P. Mawby, S. Dhar, John R. Williams, Stable Phosphorus Passivated SiO2/4H-SiC Interface Using Thin Oxides Materials Science Forum. ,vol. 806, pp. 139- 142 ,(2014) , 10.4028/WWW.SCIENTIFIC.NET/MSF.806.139
Juan C. Ranuárez, M.J. Deen, Chih-Hung Chen, A review of gate tunneling current in MOS devices Microelectronics Reliability. ,vol. 46, pp. 1939- 1956 ,(2006) , 10.1016/J.MICROREL.2005.12.006
Kwyro Lee, Michael Shur, Timothy J. Drummond, Hadis Morkoç, Electron density of the two-dimensional electron gas in modulation doped layers Journal of Applied Physics. ,vol. 54, pp. 2093- 2096 ,(1983) , 10.1063/1.332259
Kodigala Subba Ramaiah, I. Bhat, T. P. Chow, J. K. Kim, E. F. Schubert, D. Johnstone, S. Akarca-Biyikli, Growth and characterization of SiC epitaxial layers on Si- and C-face 4H SiC substrates by chemical-vapor deposition Journal of Applied Physics. ,vol. 98, pp. 106108- ,(2005) , 10.1063/1.2132520
R. E. Burgess, H. Kroemer, J. M. Houston, Corrected Values of Fowler-Nordheim Field Emission Functions v(y) and s(y) Physical Review. ,vol. 90, pp. 515- 515 ,(1953) , 10.1103/PHYSREV.90.515
C. W. Litton, D. Johnstone, S. Akarca-Biyikli, K. S. Ramaiah, I. Bhat, T. P. Chow, J. K. Kim, E. F. Schubert, Effect of C∕Si ratio on deep levels in epitaxial 4H–SiC Applied Physics Letters. ,vol. 88, pp. 121914- ,(2006) , 10.1063/1.2161388
Subba Ramaiah Kodigala, Somnath Chattopadhyay, Charles Overton, Ira Ardoin, B.J. Gordon, D. Johnstone, D. Roy, D. Barone, Growth and surface analysis of SiO2 on 4H-SiC for MOS devices Applied Surface Science. ,vol. 330, pp. 465- 475 ,(2015) , 10.1016/J.APSUSC.2014.12.116
Michael Krieger, Svetlana Beljakowa, Bernd Zippelius, Valeri V. Afanas'ev, Anton J. Bauer, Yuichiro Nanen, Tsunenobu Kimoto, Gerhard Pensl, Detection and Electrical Characterization of Defects at the SiO2/4H-SiC Interface Materials Science Forum. ,vol. 645-648, pp. 463- 468 ,(2010) , 10.4028/WWW.SCIENTIFIC.NET/MSF.645-648.463