Ammonia sensitivity of amorphous carbon film/silicon heterojunctions
作者： Xili Gao , Qingzhong Xue , Lanzhong Hao , Qingbin Zheng , Qun Li
DOI: 10.1063/1.2790371
关键词: Silicon 、 Sputter deposition 、 Nanotechnology 、 Amorphous carbon 、 Materials science 、 Sputtering 、 Heterojunction 、 Adsorption 、 Optoelectronics 、 Space charge 、 Carbon
摘要: The amorphous carbon film/n-Si (a-C∕Si) junctions have been fabricated by magnetron sputtering. results show that these good rectifying properties and high ammonia (NH3) gas sensitivity. For a given reverse bias voltage, the resistance of junction can increase 100 times rapidly when exposed to NH3 gas. This phenomenon may be attributed change space charge width junction, which is caused adsorption molecules. study shows a-C∕Si potential application as detect sensors.
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