Supplemental sensor modes and systems for ultrasonic transducers
作者： Michael Daneman , Nikhil Apte , Renata Melamud Berger
DOI:
关键词: Piezoelectricity 、 Microelectromechanical systems 、 Capacitive micromachined ultrasonic transducers 、 Optoelectronics 、 Ultrasonic sensor 、 PMUT 、 Capacitive sensing 、 Air gap (plumbing) 、 Materials science 、 Electrode
摘要: A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. membrane such that cavity defined between substrate, where configured allow movement at ultrasonic frequencies. comprises piezoelectric layer first second electrodes coupled opposing sides of layer. For operation in Capacitive (CMUT) mode, third electrode disposed on separated by air gap from electrode. Also provided are integrated MEMS array, method for operating array PMUT/CMUT dual-mode devices, device.
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