Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor
作者： Jae-Min Kim , Han-Bo-Ram Lee , Clement Lansalot , Christian Dussarrat , Julien Gatineau
关键词: Atomic layer deposition 、 Substrate (electronics) 、 Inorganic chemistry 、 Atomic layer epitaxy 、 Thin film 、 Materials science 、 Isopropyl 、 Cobalt 、 Deposition (chemistry) 、 Cyclopentadienyl complex 、 General Engineering 、 General Physics and Astronomy
摘要: … Co thin film was produced well not only on both SiO2 (100 nm) and Si(001) substrate but also on Kapton tape which is composed of polyimide. Furthermore, our group successfully …
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