Reliability of sputter deposited aluminum-doped zinc oxide under harsh environmental conditions
作者： Mohammad M. Hamasha , Tara P. Dhakal , Parag Vasekar , Khalid Alzoubi , Susan Lu
DOI: 10.1016/J.SOLENER.2012.12.006
关键词: Sputtering 、 Crystallinity 、 Thin film 、 Relative humidity 、 Electrical resistance and conductance 、 Humidity 、 Float glass 、 Microstructure 、 Materials science 、 Composite material
摘要: Abstract We report the reliability of aluminum-doped zinc oxide (AZO) thin films exposed to harsh environmental conditions damp heat. Identical sets AZO grown on float glass substrates were subjected four different controlled environments temperature and relative humidity. The selected high low levels 100 °C 20 °C respectively humidity 100% 20% respectively. total exposure time for this environment was 120 h. Electrical resistance measured every 24 h each sample. Material composition, crystallinity, optical transmittance surface morphology investigated after 120 h time. A mixed, full-factorial design experiment used in study, with response being electrical resistance. factors time, ANOVA results showed that all considered significant. Although film increased by 20%, microstructure bulk film, crystallinity properties combinations unchanged.
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