Moisture-Induced Surface Corrosion in AZO Thin Films Formed by Atomic Layer Deposition
作者： Tara P. Dhakal , Mohammad M. Hamasha , Abhishek S. Nandur , Daniel Vanhart , Parag Vasekar
DOI: 10.1109/TDMR.2012.2186574
关键词:
摘要: Aluminum-doped zinc oxide (AZO) thin film is a viable alternative to tin-doped indium oxide, the dominant transparent conducting used in solar cells. The durability of AZO films grown by atomic layer deposition technique, which known form layers with precision, studied. were subjected harsh environmental conditions varying temperatures and humidity, their changes surface morphology conductivity are investigated. Four different combinations temperature (100°C 20°C) relative humidity (100% 20%) used. It was found that exposed high-moisture resulted corrosion lowered conductivity. However, SEM cross-sectional images showed bulk unaffected. corroded had contaminants deposited from measurement chamber as observed XPS elemental analysis. Detailed phase analysis presence hydroxide carbonate inside regions.
sci-hub.se 参考文章(41)
T. Minami, H. Sato, H. Nanto, S. Takata, Heat treatment in hydrogen gas and plasma for transparent conducting oxide films such as ZnO, SnO2 and indium tin oxide Thin Solid Films. ,vol. 176, pp. 277- 282 ,(1989) , 10.1016/0040-6090(89)90100-4
Abhijit Dasgupta, Michael G. Pecht, Barry Mathieu, Design-or-experiment methods for computational parametric studies in electronic packaging Finite Elements in Analysis and Design. ,vol. 30, pp. 125- 146 ,(1998) , 10.1016/S0168-874X(98)00033-X
K.L. Chopra, S. Major, D.K. Pandya, Transparent conductors—A status review Thin Solid Films. ,vol. 102, pp. 1- 46 ,(1983) , 10.1016/0040-6090(83)90256-0
Daniel Huang, Frank Liao, Steven Molesa, David Redinger, Vivek Subramanian, Plastic-Compatible Low Resistance Printable Gold Nanoparticle Conductors for Flexible Electronics Journal of The Electrochemical Society. ,vol. 150, ,(2003) , 10.1149/1.1582466
Chih-hao Yang, Shih-chin Lee, Tien-chai Lin, Suz-cheng Chen, Electrical and optical properties of indium tin oxide films prepared on plastic substrates by radio frequency magnetron sputtering Thin Solid Films. ,vol. 516, pp. 1984- 1991 ,(2008) , 10.1016/J.TSF.2007.05.093
J Mass, P Bhattacharya, R.S Katiyar, Effect of high substrate temperature on Al-doped ZnO thin films grown by pulsed laser deposition Materials Science and Engineering B-advanced Functional Solid-state Materials. ,vol. 103, pp. 9- 15 ,(2003) , 10.1016/S0921-5107(03)00127-2
Ramesh G. Dhere, Maximilien Bonnet-Eymard, Emilie Charlet, Emmanuelle Peter, Joel N. Duenow, Jian V. Li, Darius Kuciauskas, Timothy A. Gessert, CdTe solar cell with industrial Al:ZnO on soda-lime glass Thin Solid Films. ,vol. 519, pp. 7142- 7145 ,(2011) , 10.1016/J.TSF.2010.11.095
E Ando, M Miyazaki, Moisture resistance of the low-emissivity coatings with a layer structure of Al-doped ZnO/Ag/Al-doped ZnO Thin Solid Films. ,vol. 392, pp. 289- 293 ,(2001) , 10.1016/S0040-6090(01)01045-8
Li-Yu Lin, Min-Chang Jeong, Dae-Eun Kim, Jae-Min Myoung, Micro/nanomechanical properties of aluminum-doped zinc oxide films prepared by radio frequency magnetron sputtering Surface & Coatings Technology. ,vol. 201, pp. 2547- 2552 ,(2006) , 10.1016/J.SURFCOAT.2006.04.067
Akio Suzuki, Tatsuhiko Matsushita, Naoki Wada, Yoshiaki Sakamoto, Masahiro Okuda, Transparent Conducting Al-Doped ZnO Thin Films Prepared by Pulsed Laser Deposition Japanese Journal of Applied Physics. ,vol. 35, pp. L56- L59 ,(1996) , 10.1143/JJAP.35.L56