Characterization of yttria-stabilized zirconium oxide buffer layers for high-temperature superconductor thin films
作者： J‐W. Lee , T. E. Schlesinger , A. K. Stamper , M. Migliuolo , D. W. Greve
DOI: 10.1063/1.342068
关键词: Sputtering 、 Composite material 、 Transmission electron microscopy 、 Mineralogy 、 Annealing (metallurgy) 、 Silicon 、 Grain size 、 Yttria-stabilized zirconia 、 Crystallite 、 Materials science 、 Thin film
摘要: We have employed transmission electron microscopy and x‐ray diffraction to investigate the properties of yttria‐stabilized zirconium oxide (YSZ) sputter deposited on silicon. It is shown that the as‐deposited YSZ films are polycrystalline (grain size 7–20 nm) with microvoids between grains. Anneals of these films at temperatures of 800, 950, and 1100° C for 1 h eliminate the microvoids and cause the grain size to increase from 20 to 50 nm at the higher anneal temperatures. Particular texture of the YSZ film is controlled by the details of the …
scitation.org
aip.org 
sci-hub.se 参考文章(9)
A. Mogro‐Campero, L. G. Turner, Thin films of Y‐Ba‐Cu‐O on silicon and silicon dioxide Applied Physics Letters. ,vol. 52, pp. 1185- 1186 ,(1988) , 10.1063/1.99670
S. I. Shah, P. F. Carcia, Superconductivity and resputtering effects in rf sputtered YBa2Cu3O7−xthin films Applied Physics Letters. ,vol. 51, pp. 2146- 2148 ,(1987) , 10.1063/1.98975
M. Morita, H. Fukumoto, T. Imura, Y. Osaka, M. Ichihara, Growth of crystalline zirconium dioxide films on silicon Journal of Applied Physics. ,vol. 58, pp. 2407- 2409 ,(1985) , 10.1063/1.335912
A. Stamper, D. W. Greve, D. Wong, T. E. Schlesinger, Sputter deposition of YBa2Cu3O6+x on alumina and the influence of ZrO2 buffer layers Applied Physics Letters. ,vol. 52, pp. 1746- 1748 ,(1988) , 10.1063/1.99720
W. Y. Lee, J. Salem, V. Lee, T. Huang, R. Savoy, V. Deline, J. Duran, High Tc YBa2Cu3O7−x thin films on Si substrates by dc magnetron sputtering from a stoichiometric oxide target Applied Physics Letters. ,vol. 52, pp. 2263- 2265 ,(1988) , 10.1063/1.99771
John A. Thornton, Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings Journal of Vacuum Science and Technology. ,vol. 11, pp. 666- 670 ,(1974) , 10.1116/1.1312732
M. Gurvitch, A. T. Fiory, Preparation and substrate reactions of superconducting Y-Ba-Cu-O films Applied Physics Letters. ,vol. 51, pp. 1027- 1029 ,(1987) , 10.1063/1.98819
R. M. Silver, A. B. Berezin, M. Wendman, A. L. de Lozanne, As-deposited superconducting Y-Ba-Cu-O thin films on Si, Al2O3, and SrTiO3 substrates Applied Physics Letters. ,vol. 52, pp. 2174- 2176 ,(1988) , 10.1063/1.99760
J.B. Torrance, J.M. Tarascon, Thompson, K. Kitazawa, J.D. Jorgensen, High-temperature superconductors Pittsburgh, PA (USA); Materials Research Society. ,(1988)