High performance thin film transistor with cosputtered amorphous Zn-In-Sn-O channel: Combinatorial approach
作者： Min Ki Ryu , Shinhyuk Yang , Sang-Hee Ko Park , Chi-Sun Hwang , Jae Kyeong Jeong
DOI: 10.1063/1.3206948
关键词: Materials science 、 Thin film 、 Subthreshold conduction 、 Field-effect transistor 、 Thin-film transistor 、 Threshold voltage 、 Sputter deposition 、 Optoelectronics 、 Amorphous solid 、 Electron mobility
摘要: … In this letter, we report on the fabrication of high performance gallium-free ZnInSnO TFTs. The optimal cation composition was determined via the combinatorial approach using the …
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