Theoretical analysis and measurement of the temperature dependence of a micromachined Fabry-Perot pressure sensor.
作者： Dagang Guo , Weijun Wang , Rongming Lin
DOI: 10.1364/AO.44.000249
关键词: Pressure sensor 、 Thin film 、 Optomechanics 、 Silicon 、 Refractive index 、 Fabry–Pérot interferometer 、 Optics 、 Materials science 、 Material properties 、 Diaphragm (mechanical device)
摘要: In this study an analytical model that takes into account the coupled photoelastic and thermo-optical effects is established to evaluate temperature dependence of a single-chip silicon micromachined Fabry-Perot pressure sensor. The results show variation has significant effect on performance sensor with conventional flat diaphragm. A new membrane-type novel deeply corrugated diaphragm then proposed. fabricated by use both surface- bulk-micromachining techniques. Both experimental cross sensitivity sensors can be substantially alleviated proposed single
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