Design and Optimization of Dual Optical Fiber MEMS Pressure Sensor For Biomedical Applications
作者： Guo Dagang , Samuel Ng Choon Po , Francis Tay Eng Hock , Lin Rongming
DOI: 10.1088/1742-6596/34/1/177
关键词:
摘要: A novel Single Deeply Corrugated Diaphragm (SDCD) based dual optical fiber Fabry-Perot pressure sensor for blood measurement is proposed. Both mechanical and simulations are performed to demonstrate the feasibility superior performance of proposed sensor. Result shows that less than 2% nonlinearity can be achieved using optimal microcavity. Also, fabrication process given, instead complicated fusion bonding process, only bulk surface micromachining techniques required which facilitate mass production such biocompatible disposable sensors.
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