Study of single deeply corrugated diaphragms for high-sensitivity microphones
作者： W J Wang , R M Lin , X Li , D G Guo
DOI: 10.1088/0960-1317/13/2/304
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摘要: In this paper, single deeply corrugated diaphragms (SDCDs) with various corrugation depths and initial stresses are studied extensively for applications to micromachined high-sensitivity devices. Finite-element model simulation results show that significant improvement in mechanical sensitivity can be achieved using a SDCD larger depth. The diaphragm has been applied the fabrication of microphone. measurements structure is promising its
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