Sub-100 nm Hard X-Ray Microbeam Generation with Fresnel Zone Plate Optics

摘要: A hard X-ray focusing test of a Fresnel zone plate has been performed with synchrotron radiation source at the undulator beamline 20XU SPring-8. radius 150 µm, and an outermost width 100 nm was used for device. The 248-m-long provides fully coherent illumination focused beam evaluated by knife-edge-scan method scanning microscope using charts. Nearly diffraction-limited size 120 achieved first-order diffraction 10 keV X-ray. Evaluation third-order also 8 X-ray, focal 50 obtained.