Diffraction-limited Microbeam with Fresnel Zone Plate Optics in Hard X-Ray Regions
作者： Yoshio Suzuki , Akihisa Takeuchi , Hidekazu Takano , Takuji Ohigashi , Hisataka Takenaka
DOI: 10.1143/JJAP.40.1508
关键词:
摘要: A hard X-ray microbeam with zone plate optics has been tested, and preliminary experiments on scanning microscopy have performed. Fresnel fabricated by the electron-beam lithography technique is used as an focusing device. The material of structure tantalum thickness about 1 µm, outermost width 0.25 µm. focused spot size measured knife-edge 0.3 µm at energy 8 keV. Closer evaluation spatial resolution done observing test patterns in a experiment, fine 0.2 µm-structure resolved.
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