Spectroscopic characteristics of Pb0.95La0.05(Zr1−yTiy)0.9875O3 plasma and growth behavior of thin films by pulsed laser deposition
作者： Hsiu‐Fung Cheng
DOI: 10.1063/1.359809
关键词: Ceramic 、 Pulsed laser deposition 、 Plume 、 Excimer laser 、 Spectral line 、 Analytical chemistry 、 Emission spectrum 、 Thin film 、 Materials science 、 Plasma
摘要: The characteristics of the spectra emitted from species ejected by excimer laser were systematically analyzed using optical emission spectroscopy and Boltzmann plot approach. These correlated with growth behavior Pb0.95La0.05(Zr1−yTiy)0.9875O3 films y=1(PLT), or y=0.3(PLZT), synthesized pulsed deposition technique. increase in energy density moderately enhances intensity spectral lines insignificantly modifies plasma temperature (Tp) Ti‐species plume. oxygen pressure PO2, on other hand, only slightly reduces but tremendously lowers Tp‐values Ti‐species. is around TPLZTp=20 300 K TPLTp=12 500 for PO2<0.01 mbar abruptly decreases to TPLZTp=13 300 TPLTp=8000 PO2=0.1 1 mbar. High PLZT plume, as compared that PLT presumably source which induces th...
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