Structural and optical properties of laser deposited ferroelectric (Sr0.2Ba0.8)TiO3 thin films
作者： Hsiu‐Fung Cheng
DOI: 10.1063/1.362346
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摘要: Laser deposition technique has been applied to synthesize (Sr0.2Ba0.8)TiO3 thin films. The crystal structure of the films and effect parameters on them have systematically examined. Among important parameters, substrate temperature chamber oxygen pressure affect characteristics most prominently. crystalline phase can only be obtained when is higher than 550 °C. Furthermore, both low high during facilitate formation (100) grains. metal‐insulator‐metal deposited Pt‐coated Si substrates, possesses good ferroelectric properties, which are indicated by butterfly‐shaped capacitance‐voltage demonstrated hysteresis loop remanence Pr=1.56 μC/cm2 coercivity Ec=13.5 kV/cm. charge‐discharge test reveals that effective dielectric constant reach a va...
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