MIM and MIS electret response of laser deposited Sr/sub x/Ba/sub 1-x/Nb/sub 2/O/sub 6/ thin films
作者： Hsiu-Fung Cheng , Gong-Shing Chiou , Kou-Shung Liu , I-Nan Lin
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摘要: The pulsed laser deposition technique has been applied to synthesize Sr/sub x/Ba/sub 1-x/Nb/sub 2/O/sub 6/ (SBN: x=0.5) thin films. polycrystalline phase of SBN films can be obtained only when the substrate temperature was higher than 680/spl deg/C. crystalline texture modified oxygen pressure varied. Both metal-insulator-metal (MIM) and metal-insulator-semiconductor (MIS) structures possess ferroelectric properties. Diffusive phase-transition characteristics dielectric constant-temperature properties indicate that a pyroelectric property. films, therefore, have potential for electret research application.
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