Silicon carbide switching device with rectifying-gate

作者: Bantval J. Baliga

DOI:

关键词: OptoelectronicsSilicon bandgap temperature sensorLOCOSGate oxideMESFETSilicon carbideMaterials scienceSiliconMOSFETSilicon on insulatorElectrical engineering

摘要: A silicon carbide switching device includes a three-terminal interconnected MOSFET and MESFET (or JFET) in composite substrate of carbide. For three terminal operation, the gate electrode is electrically shorted to source region MOSFET, connected drain substrate. Accordingly, control provided by JFET). The designed be normally-off therefore blocks positive biases when electrode. At low biases, blocking which has nonconductive active region. Higher are supported formation depletion To turn-on device, biased an inversion layer channel relatively resistance formed connects with thereby bias applied.

参考文章(17)
Richard A. Blanchard, Adrian I. Cogan, Dual-gate high density fet ,(1987)
Khai D. T. Ngo, Charles S. Korman, Hsueh-Rong Chang, Robert L. Steigerwald, John P. Walden, Bantval J. Baliga, Low noise, high frequency synchronous rectifier ,(1988)
Hsueh-Rong Chang, Edward K. Howell, Bantval J. Baliga, Bidirectional field effect semiconductor device and circuit ,(1988)
John W Bumgarner, H-S Kong, HJ Kim, JW Palmour, JA Edmond, JT Glass, F Davis Robert, None, Monocrystalline beta -SiC semiconductor thin films: epitaxial growth, doping, and FET device development 38th Electronics Components Conference 1988., Proceedings.. pp. 342- 349 ,(1988) , 10.1109/ECC.1988.12615
Paul A. Gough, MOS-gated thyristor ,(1992)
H.-R. Chang, B.J. Baliga, 500-V n-channel insulated-gate bipolar transistor with a trench gate structure IEEE Transactions on Electron Devices. ,vol. 36, pp. 1824- 1829 ,(1989) , 10.1109/16.34248
S. Colak, B. Singer, E. Stupp, Lateral DMOS Power transistor design IEEE Electron Device Letters. ,vol. 1, pp. 51- 53 ,(1980) , 10.1109/EDL.1980.25226
K. Shenai, R.S. Scott, B.J. Baliga, Optimum semiconductors for high-power electronics IEEE Transactions on Electron Devices. ,vol. 36, pp. 1811- 1823 ,(1989) , 10.1109/16.34247