Microelectromechanical tunable inductor
作者： Vincent M. Hietala , James G. Fleming , Harold L. Stalford
DOI:
关键词: Electrical engineering 、 Inductance 、 Inductor 、 Electrode 、 Semiconductor device fabrication 、 Stress gradient 、 Optoelectronics 、 Substrate (electronics) 、 Materials science 、 Electromagnetic coil
摘要: A microelectromechanical tunable inductor is formed from a pair of substantially-identically-sized coils arranged side by and coiled up about central axis which parallel to supporting substrate. An in-plane stress gradient responsible for coiling the which. The inductance provided can be electrostatically changed either continuously or in discrete steps using electrodes on substrate each coil. with processes are compatible conventional IC fabrication so that, some cases, semiconductor alongside top an IC.
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