A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process
作者： S. Chang , S. Sivoth
关键词:
摘要: … fabricated inductors were measured from 50 MHz to 20 GHz with … measured inductance at low frequency can be tuned from … , electrostatic actuation can be used the tune the RF MEMS …
harvard.edu
sci-hub.se 参考文章(17)
J.M. Dell, K. Winchester, C.A. Musca, J. Antoszewski, L. Faraone, Variable MEMS-based inductors fabricated from PECVD silicon nitride conference on optoelectronic and microelectronic materials and devices. pp. 567- 570 ,(2002) , 10.1109/COMMAD.2002.1237315
Jun-Bo Yoon, Yun-Seok Choi, Byeong-Il Kim, Yunseong Eo, Euisik Yoon, CMOS-compatible surface-micromachined suspended-spiral inductors for multi-GHz silicon RF ICs IEEE Electron Device Letters. ,vol. 23, pp. 591- 593 ,(2002) , 10.1109/LED.2002.803767
Shifang Zhou, Xi-Qing Sun, William N Carr, A monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation Journal of Micromechanics and Microengineering. ,vol. 9, pp. 45- 50 ,(1999) , 10.1088/0960-1317/9/1/305
Stella Chang, Siva Sivoththaman, Development of a low temperature MEMS process with a PECVD amorphous silicon structural layer Journal of Micromechanics and Microengineering. ,vol. 16, pp. 1307- 1313 ,(2006) , 10.1088/0960-1317/16/7/027
Imed Zine-El-Abidine, Michal Okoniewski, John G McRory, Tunable radio frequency MEMS inductors with thermal bimorph actuators Journal of Micromechanics and Microengineering. ,vol. 15, pp. 2063- 2068 ,(2005) , 10.1088/0960-1317/15/11/010
RF MEMS for ubiquitous wireless connectivity. Part II. Application IEEE Microwave Magazine. ,vol. 5, pp. 36- 49 ,(2004) , 10.1109/MMW.2004.1380277
J.Y. Park, M.G. Allen, High O spiral-type microinductors on silicon substrates ieee international magnetics conference. ,vol. 35, pp. 3544- 3546 ,(1999) , 10.1109/20.800584
Y.C. Liang, Wenjiang Zeng, Pick Hong Ong, Zhaoxia Gao, Jun Cai, N. Balasubramanian, A concise process technology for 3-D suspended radio frequency micro-inductors on silicon substrate IEEE Electron Device Letters. ,vol. 23, pp. 700- 703 ,(2002) , 10.1109/LED.2002.805748
R.P. Ribas, J. Lescot, J.-L. Leclercq, J.M. Karam, F. Ndagijimana, Micromachined microwave planar spiral inductors and transformers IEEE Transactions on Microwave Theory and Techniques. ,vol. 48, pp. 1326- 1335 ,(2000) , 10.1109/22.859477
Hongrui Jiang, Ye Wang, J-LA Yeh, Norman C Tien, None, On-chip spiral inductors suspended over deep copper-lined cavities IEEE Transactions on Microwave Theory and Techniques. ,vol. 48, pp. 2415- 2423 ,(2000) , 10.1109/22.898992