Tunable radio frequency MEMS inductors with thermal bimorph actuators
作者： Imed Zine-El-Abidine , Michal Okoniewski , John G McRory
DOI: 10.1088/0960-1317/15/11/010
关键词: Surface micromachining 、 Electronic circuit 、 Electronic engineering 、 Radio frequency 、 Engineering 、 Actuator 、 Wireless 、 Electrical engineering 、 Bimorph 、 Inductor 、 Microelectromechanical systems
摘要: We have developed a CMOS-compatible micromachining process that allows us to build high quality, tunable radio frequency inductors. Inductors play key role in wireless front ends; the additional flexibility offered by tunability can offer adaptability devices such as filters, matching circuits and voltage-controlled oscillators. Our inductors tuning range of up 30% with quality factor 25 self-resonance over 35 GHz.
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