Preparation of Bi Iron Garnet Film with a Two-Step Growth Technique

作者: Shinji Mino , Morito Matsuoka , Atsushi Shibukawa , Ken'ichi Ono

DOI: 10.1143/JJAP.29.L1823

关键词: Faraday effectSputteringFigure of meritWaveguide (optics)OptoelectronicsMaterials scienceOpticsWavelengthElectron cyclotron resonanceBismuthCrystallinityGeneral EngineeringGeneral Physics and Astronomy

摘要: Completely Bi-substituted iron garnet (Bi3Fe5O12, BiIG) film with a smooth surface is synthesized by electron cyclotron resonance (ECR) sputtering using two-step growth technique. Consequently, the waveguide propagation loss of BiIG at wavelength 1.55 µm can be measured. The smoothness and improved buffer layer as thin 2 nm, temperature Tb (400°C≤Tb≤600°C) increased. This shows that crystallinity plays an important role in making low.

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