作者: Shinji Mino , Morito Matsuoka , Atsushi Shibukawa , Ken'ichi Ono
关键词: Faraday effect 、 Sputtering 、 Figure of merit 、 Waveguide (optics) 、 Optoelectronics 、 Materials science 、 Optics 、 Wavelength 、 Electron cyclotron resonance 、 Bismuth 、 Crystallinity 、 General Engineering 、 General Physics and Astronomy
摘要: Completely Bi-substituted iron garnet (Bi3Fe5O12, BiIG) film with a smooth surface is synthesized by electron cyclotron resonance (ECR) sputtering using two-step growth technique. Consequently, the waveguide propagation loss of BiIG at wavelength 1.55 µm can be measured. The smoothness and improved buffer layer as thin 2 nm, temperature Tb (400°C≤Tb≤600°C) increased. This shows that crystallinity plays an important role in making low.