Completely Bi-Substituted Iron Garnet (BIG) Films Prepared by Electron Cyclotron Resonance (ECR) Sputtering

摘要: Completely Bi-substituted iron garnet (BIG) films were epitaxially synthesized on substrates by electron cyclotron resonance (ECR) sputtering. The critical temperature for the epitaxial growth, crystallinities, and Faraday rotation θF of BIG depend O2 gas flow rate. With an optimum rate 7 sccm, single-crystal obtained at temperatures above 390°C, achieved its largest value 8.4×104 deg/cm (λ=0.633 µm). minimum ferromagnetic (FMR) linewidth ΔH was 70 Oe; this is smallest ever reported. uniaxial perpendicular magnetic anisotropy mainly caused elastic deformation induced thermal expansion mismatch between film substrate.