X-ray diffractometry of small defects in layered systems

摘要: X-ray diffraction in thin layers and layered systems is described using the optical coherence approach semi-kinematical theory. Two defect models are considered-the mosaic structure model of interface roughness. For both reflection curves a layer superlattice have been calculated compared with double-crystal diffractometry results on superlattices epitaxial layers. The distribution diffusely scattered intensity near reciprocal lattice point has theoretically for it proved experimentally by double- triple-crystal structure. It demonstrated that theory yields tool estimating predominant type