Fabrication and ferroelectric properties of highly dense lead-free piezoelectric (K0.5Na0.5)NbO3 thick films by aerosol deposition
作者： Jungho Ryu , Jong-Jin Choi , Byung-Dong Hahn , Dong-Soo Park , Woon-Ha Yoon
DOI: 10.1063/1.2720751
关键词: Permittivity 、 Ceramic 、 Composite material 、 Carbon film 、 Materials science 、 Fabrication 、 Piezoelectricity 、 Annealing (metallurgy) 、 Dielectric 、 Ferroelectricity
摘要: Lead-free piezoelectric thick films of (K0.5Na0.5)NbO3 were fabricated by aerosol-deposition method. The thickness KNN film was 7.1μm and fully dense obtained. dielectric constants e3T∕e0 the as-deposited annealed at 1kHz 116 545, respectively, which are higher than any previously reported values for lead-free thin/thick films, either without or with heat treatment. ferroelectric properties improved after annealing maximum Pr=8.1μC∕cm3 Ec=100kV∕cm achieved. These markedly superior to those sintered ceramic counterparts.
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