Effects of rapid thermal annealing and SiO2 encapsulation on GaNAs/GaAs single quantum wells grown by plasma-assisted molecular-beam epitaxy

作者: L. H. Li , Z. Pan , Y. Q. Xu , Y. Du , Y. W. Lin

DOI: 10.1063/1.1367276

关键词: OptoelectronicsQuantum wellPhotoluminescenceAnnealing (metallurgy)SuperlatticeAnalytical chemistryBand gapMolecular beam epitaxyEpitaxyBlueshift

摘要: Effects of rapid thermal annealing and SiO2 encapsulation on GaNAs/GaAs single quantum wells grown by plasma-assisted molecular-beam epitaxy were studied. Photoluminescence measurements a series samples with different well widths N compositions used to evaluate the effects. The intermixing GaNAs GaAs layers was clearly enhanced presence SiO2-cap layer. However, it strongly dependent composition. After at 900 degreesC for 30 s, blueshift up 62 meV observed SiO2-capped region sample composition 1.5%, whereas only small 26 exhibited bare region. For 3.1%, nearly identical photoluminescence peak energy shift both observed. It is suggested that mainly dominated layer induced defects-assisted diffusion smaller composition, while increasing assisted interior defects become predominant. (C) 2001 American Institute Physics.

参考文章(15)
Z. Pan, Y. T. Wang, L. H. Li, H. Wang, Z. Wei, Z. Q. Zhou, Y. W. Lin, STRAIN RELAXATION OF GANXAS1-X ON GAAS (001) GROWN BY MOLECULAR-BEAM EPITAXY Journal of Applied Physics. ,vol. 86, pp. 5302- 5304 ,(1999) , 10.1063/1.371516
K.D. Choquette, J.F. Klem, A.J. Fischer, O. Blum, A.A. Allerman, I.J. Fritz, S.R. Kurtz, W.G. Breiland, R. Sieg, K.M. Geib, J.W. Scott, R.L. Naone, Room temperature continuous wave InGaAsN quantum well vertical cavity lasers emitting at 1.3 um Electronics Letters. ,vol. 36, pp. 1388- 1390 ,(2000) , 10.1049/EL:20000928
H. Z. Chen, A. Ghaffari, H. Morkoç, A. Yariv, Effect of substrate tilting on molecular beam epitaxial grown AlGaAs/GaAs lasers having very low threshold current densities Applied Physics Letters. ,vol. 51, pp. 2094- 2096 ,(1987) , 10.1063/1.98958
G. S. Kinsey, D. W. Gotthold, A. L. Holmes, J. C. Campbell, GaNAs resonant-cavity avalanche photodiode operating at 1.064 μm Applied Physics Letters. ,vol. 77, pp. 1543- 1544 ,(2000) , 10.1063/1.1308272
L. H. Li, Z. Pan, W. Zhang, Y. W. Lin, Z. Q. Zhou, R. H. Wu, Effects of rapid thermal annealing on the optical properties of GaNxAs1−x/GaAs single quantum well structure grown by molecular beam epitaxy Journal of Applied Physics. ,vol. 87, pp. 245- 248 ,(2000) , 10.1063/1.371852
J. D. Ralston, S. O’Brien, G. W. Wicks, L. F. Eastman, Room‐temperature exciton transitions in partially intermixed GaAs/AlGaAs superlattices Applied Physics Letters. ,vol. 52, pp. 1511- 1513 ,(1988) , 10.1063/1.99115
S. O’Brien, D. P. Bour, J. R. Shealy, Disordering, intermixing, and thermal stability of GaInP/AlInP superlattices and alloys Applied Physics Letters. ,vol. 53, pp. 1859- 1861 ,(1988) , 10.1063/1.100377
J. B. Héroux, X. Yang, W. I. Wang, GaInNAs resonant-cavity-enhanced photodetector operating at 1.3 μm Applied Physics Letters. ,vol. 75, pp. 2716- 2718 ,(1999) , 10.1063/1.125126
E. V. K. Rao, A. Ougazzaden, Y. Le Bellego, M. Juhel, Optical properties of low band gap GaAs(1−x)Nx layers: Influence of post-growth treatments Applied Physics Letters. ,vol. 72, pp. 1409- 1411 ,(1998) , 10.1063/1.120579
J. S. Tsang, C. P. Lee, S. H. Lee, K. L. Tsai, H. R. Chen, Kinetics of compositional disordering of AlGaAs/GaAs quantum wells induced by low‐temperature grown GaAs Journal of Applied Physics. ,vol. 77, pp. 4302- 4306 ,(1995) , 10.1063/1.359453