Precision measurement of wavelengths emitted by a molecular fluorine laser at 157nm

作者: Craig J. Sansonetti , Joseph Reader , Klaus Vogler

DOI: 10.1364/AO.40.001974

关键词: OptoelectronicsLaser linewidthBeam parameter productLaserWavelengthTunable laserX-ray laserMaterials scienceOpticsSpectrometerFar-infrared laser

摘要: An excimer or molecular fluorine laser system includes a wavelength calibration module permitting the of narrow band output beam to be calibrated specific absolute wavelength. The is preferably lamp which contains at least one species including platinum with an optical transition within emission spectrum system. Light from coincident spectrometer portion laser, and by simultaneous analysis spectrograph.

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