Resonator arrangement for bandwidth control
作者： Juergen Kleinschmidt , Matthias Ulrich , Konstantin Aab , Peter Lokai
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摘要: A line-narrowed excimer or molecular fluorine laser system includes a discharge chamber filled with gas mixture at least including and buffer gas, multiple electrodes within the connected to circuit for energizing mixture, resonator pair of reflecting surfaces disposed on either side generating beam, line-narrowing/selection unit narrowing bandwidth beam. The further third surface which is deformable between surfaces. preferably beam expander dispersive element, wherein element.
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