Narrow band excimer or molecular fluorine laser having an output coupling interferometer

摘要: An excimer or molecular fluorine laser includes a discharge chamber filled with gas mixture, multiple electrodes within the connected to power supply circuit for energizing and resonator including pair of reflectors generating an output beam. One is coupling interferometer opposing reflecting surfaces tuned produce reflectivity maximum at selected wavelength narrowing linewidth configured such that have varying optical distance therebetween over incident beam cross-section which serves suppress outer portions reduce spectral purity. Preferably, this surface non-planar, may include step, recess raised recessed curved portion quarter in height depth, respectively.