Micromachined Terahertz Rectangular Waveguide Bandpass Filter on Silicon-Substrate
作者： Jiang Hu , Shanyi Xie , Yong Zhang
DOI: 10.1109/LMWC.2012.2228179
关键词: Terahertz radiation 、 Deep reactive-ion etching 、 Silicon 、 Optics 、 Bandwidth (signal processing) 、 Insertion loss 、 Band-pass filter 、 Waveguide filter 、 Materials science
摘要: … expensive to fabricate THz rectangular waveguide filters by using … Several rectangular waveguide filters based on micro-electro… based micromachined rectangular waveguide bandpass …
sci-hub.se 参考文章(10)
Maolong Ke, Talal Skaik, Shilong Qian, Yi Wang, Michael Lancaster, A micromachined WR-3 waveguide with embedded bends for direct flange connections european microwave conference. pp. 1225- 1228 ,(2010)
X. H. Zhao, J. F. Bao, G. C. Shan, Y. J. Du, Y. B. Zheng, Y. Wen, C. H. Shek, D-Band Micromachined Silicon Rectangular Waveguide Filter IEEE Microwave and Wireless Components Letters. ,vol. 22, pp. 230- 232 ,(2012) , 10.1109/LMWC.2012.2193121
Hong Jun Tang, Wei Hong, Guang Qi Yang, Ji Xin Chen, Silicon based THz antenna and filter with MEMS process international workshop on antenna technology. pp. 148- 151 ,(2011) , 10.1109/IWAT.2011.5752383
X. Shang, M.L. Ke, Y. Wang, M.J. Lancaster, Micromachined WR-3 waveguide filter with embedded bends Electronics Letters. ,vol. 47, pp. 545- 547 ,(2011) , 10.1049/EL.2011.0525
V.M. Lubecke, K. Mizuno, G.M. Rebeiz, Micromachining for terahertz applications IEEE Transactions on Microwave Theory and Techniques. ,vol. 46, pp. 1821- 1831 ,(1998) , 10.1109/22.734493
Y. Li, P. L. Kirby, O. Offranc, J. Papapolymerou, Silicon Micromachined W-Band Hybrid Coupler and Power Divider Using DRIE Technique IEEE Microwave and Wireless Components Letters. ,vol. 18, pp. 22- 24 ,(2008) , 10.1109/LMWC.2007.911978
James R. Stanec, N. Scott Barker, Fabrication and Integration of Micromachined Submillimeter-Wave Circuits IEEE Microwave and Wireless Components Letters. ,vol. 21, pp. 409- 411 ,(2011) , 10.1109/LMWC.2011.2158411
M. Vahidpour, K. Sarabandi, Micromachined J-band rectangular waveguide filter ursi general assembly and scientific symposium. pp. 1- 4 ,(2011) , 10.1109/URSIGASS.2011.6050631
P.L. Kirby, D. Pukala, H. Manohara, I. Mehdi, J. Papapolymerou, A micromachined 400 GHz rectangular waveguide and 3-pole bandpass filter on a silicon substrate international microwave symposium. ,vol. 2, pp. 1185- 1188 ,(2004) , 10.1109/MWSYM.2004.1339198
Lihan Chen, Alex Arsenovic, James R Stanec, Theodore J Reck, Arthur W Lichtenberger, Robert M Weikle, N Scott Barker, A Micromachined Terahertz Waveguide 90 $^{\circ}$ Twist IEEE Microwave and Wireless Components Letters. ,vol. 21, pp. 234- 236 ,(2011) , 10.1109/LMWC.2011.2127467