Radio-frequency sputtering system with rotary target for fabricating solar cells
作者： Zhigang Xie , Wei Wang , Zheng Xu , Jianming Fu
DOI:
关键词: Reaction chamber 、 Longitudinal axis 、 RF power amplifier 、 Optoelectronics 、 Sputtering 、 Fabrication 、 Electrical engineering 、 Engineering 、 Radio frequency sputtering
摘要: One embodiment of the present invention provides a sputtering system for large-scale fabrication solar cells. The includes reaction chamber, rotary target situated inside chamber which is capable rotating about longitudinal axis, and an RF power source coupled to at least one end enable sputtering. length between 0.5 5 meters.
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