Modelling and performance evaluation of a MEMS dc/dc converter

摘要: Microelectromechanical (MEMS) structures for dc voltage conversion on a silicon substrate are presented. The boost replaces the normal inductor energy storage in magnetic field by mechanical system. design of MEMS converter is presented with good agreement between analytical and finite-element modelling (FEM) methods. A discrete model output at each actuation cycle developed results compared electrical device simulation PSpice environment. takes account parasitic components system implementation, particular blocking diode/switch. Typical diode capacitance values investigated gain these conditions found to be negligible. use switch role can minimize problems cost more expensive control circuitry increased power consumption. suitable application an RF receiver intermittent electrostatic array resonators requiring high transient voltages described. efficiency operation less than 1.4% but total consumption around 1 mJ this may acceptable mode operation.