Profiles; How Well Can Experimental Results be Explained by Theories ?
作者： S. Furukawa , H. Ishiwara
DOI: 10.1007/978-1-4684-2151-4_18
关键词: Computational physics 、 Deformation (meteorology) 、 Substrate (electronics) 、 Ion 、 Sputtering 、 Materials science
摘要: This paper reviews the current status of theoretical and experimental investigations on spatial distribution implanted ions. The predictions show reasonably good agreement with results in both cases uniform double-layer substrates. Deformation distributions due to secondary effects such as sputtering or expansion substrate is also discussed.
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