A method for thickness determination of thin films of amalgamable metals by total-reflection X-ray fluorescence
作者： L. Bennun , E.D. Greaves , H. Barros , J. Díaz-Valdés
DOI: 10.1016/J.NIMB.2009.04.018
关键词: Thin film 、 Total internal reflection 、 Homogeneous 、 Peak intensity 、 Materials science 、 Metal 、 Fluorescence 、 Analytical chemistry 、 X-ray fluorescence 、 Spectral line
摘要: Abstract A method for thickness determination of thin amalgamable metallic films by total-reflection X-ray fluorescence (TXRF) is presented. The peak’s intensity in TXRF spectra are directly related to the surface density sample, i.e. its a homogeneous film. Performing traditional analysis on film an amalgamated metal, and determining relative peak specific metal line, layer can be precisely obtained. In case gold determination, mercury peaks overlap, hence we have developed general data processing scheme achieve most precise results.
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